The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2001
Filed:
Aug. 15, 2000
Nikon Corporation, Tokyo, JP;
Abstract
A static air-bearing provides a gas layer between two relatively movable parts (fixed part and movable part) and a predetermined clearance between the two parts, to a stage apparatus, and to an optical apparatus, and provides a static air-bearing, a stage apparatus, and an optical apparatus each of which can limit its size and can make pipe arrangement easy. The static air-bearing comprising a fixed part,and a movable part,movably disposed along the fixed part,and maintaining a predetermined clearance between the fixed part,and the movable part,by an air layer between the fixed part,and the movable part,the movable part,having a bearing pad,that blows air into the air layer between the fixed part,and the movable part,and an air exhaust groove,that exhausts the air blown out of the bearing pad,and the fixed part,having an air exhaust port,that is disposed at a position facing the air exhaust groove
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile