The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2001
Filed:
Dec. 15, 2000
Applicant:
Inventor:
Katsunori Nagamatsu, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 4/014 ; G01B 1/100 ;
U.S. Cl.
CPC ...
H01J 4/014 ; G01B 1/100 ;
Abstract
The level of a laser beam is controlled to the maximum level detectable by a sensor, and light transmitted through the pattern is normalized with branched light. The laser beam level is made up for variations, and noise at zero and saturation levels are removed. Data thus can be taken out, in which noise in edge portions is always at a constant level. It is thus possible to increase the pattern image accuracy and obtain sharper image.