The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2001
Filed:
Sep. 23, 1999
Applicant:
Inventors:
Katherine E. Violette, Dallas, TX (US);
Rick L. Wise, Fairview, TX (US);
Stanton P. Ashburn, McKinney, TX (US);
Mahalingam Nandakumar, Plano, TX (US);
Douglas T. Grider, McKinney, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/136 ;
U.S. Cl.
CPC ...
H01L 2/136 ;
Abstract
Silicon substrate isolation by epitaxial growth of silicon through windows in a mask made of silicon nitride (,) on silicon oxide (,) with the silicon oxide etched to undercut the silicon nitride; the mask is on a silicon substrate.