The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2001
Filed:
Jul. 10, 2000
David G. Stites, Los Altos, CA (US);
Ultratech Stepper, Inc., San Jose, CA (US);
Abstract
A folded light tunnel apparatus and method of providing light with a high degree of spatial uniformity in a compact arrangement. The light tunnel (,) comprises plurality of prisms (,) having a different cross-sectional dimension (W) and at least one beveled end (,E) having a corresponding beveled end face (,F) through which light reflected by the beveled end passes. The plurality of prisms are arranged adjacent one another in a either two-dimensional or three dimensional stack, with each beveled end face arranged adjacent another beveled end face such that light reflected from one beveled end is received by said adjacent beveled end face and coupled into the adjacent prism. The width of the prisms is governed by a scaling factor (K or K′) that depends on whether the prism stack is two-dimensional or three-dimensional. Designing the light tunnel according to the scaling factor allows for the light tunnel to be theoretically 100% efficient in the transmission of light.