The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 27, 2001

Filed:

Apr. 09, 1999
Applicant:
Inventor:

Katsushige Tsuno, Tokyo, JP;

Assignee:

Jeol Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 4/946 ;
U.S. Cl.
CPC ...
H01J 4/946 ;
Abstract

There is disclosed an electron microscope equipped with an &OHgr;-filter and having an improved energy resolution. An objective lens and an intermediate lens system are mounted upstream of the filter. A projector lens system is mounted downstream of the filter. When a total magnification is entered from an input device, a controller sets the magnification of the projector lens system and the magnification of the lens system upstream of the filter so as to make the energy resolution highest. The exciting portion of the microscope is excited accordingly. Exciting currents for accomplishing a desired magnification are supplied from the exciting portion to the lenses. This optimizes the magnification of the projector lens system and the magnification of the lens system upstream of the &OHgr;-filter, thus achieving higher-energy resolution.


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