The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
May. 17, 1999
Shamouil Shamouilian, San Jose, CA (US);
Arnold Kholodenko, San Francisco, CA (US);
Siamak Salimian, Sunnyvale, CA (US);
Hamid Noorbakhsh, Fremont, CA (US);
Efrain Quiles, San Jose, CA (US);
Dennis S. Grimard, Ann Arbor, MI (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A chuck,for holding a substrate,comprises a surface,capable of receiving the substrate,the surface,having a gas inlet port,and a gas exhaust port,A non-sealing protrusion is between the gas inlet port,and the gas exhaust port,The non-sealing protrusion,impedes the flow of heat transfer gas between the gas inlet port,and the gas exhaust port,without blocking the flow of heat transfer gas. Preferably, a sealing protrusion,is provided around the periphery of the chuck,to form a substantially gas-tight seal with the substrate,to enclose and prevent leakage of heat transfer gas into a surrounding chamber