The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
May. 02, 2000
Applicant:
Inventors:
Anjam Khursheed, Singapore, SG;
Jacob Chee Hong Phang, Singapore, SG;
John Thiam Leong Thong, Singapore, SG;
Assignee:
Institute of Materials Research and Engineering, Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/718 ;
U.S. Cl.
CPC ...
H01J 3/718 ;
Abstract
A detachable, portable SEM column that is easily disconnected from the electron gun assembly and specimen chamber of the system, allowing different column designs to be used in a given SEM system. As an alternate design, the electron gun and column are configured as a single detachable, portable assembly. The column of the present invention contains a condenser lens and an objective lens, both designed employing permanent magnet elements for primary field generation. Relatively small coils are used for scanning and precise adjustment of focus.