The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
Mar. 11, 1999
Applicant:
Inventors:
Ming-Shing Chen, Feng-Shan, TW;
Yung-Chieh Kuo, Taipei, TW;
Assignee:
United Microelectronics Corp., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/144 ; H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/144 ; H01L 2/14763 ;
Abstract
A method of forming a barrier layer is described. A dielectric layer is formed on a substrate. The dielectric layer comprises an opening exposing a portion of the substrate. A metallic layer, which is conformal to the opening, is formed on the dielectric layer. A first metallic nitride layer, which is conformal to the opening, is formed on the first metallic layer by chemical vapor deposition. The second metallic nitride layer, which is conformal to the opening, is formed on the first metallic nitride layer.