The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
Feb. 17, 1998
Applicant:
Inventors:
Koji Kato, Hitachi, JP;
Masahiro Hashimoto, Kita-Ibaragi, JP;
Michiaki Hashimoto, Tsukuba, JP;
Toshio Sakamizu, Sagamihara, JP;
Hiroshi Shiraishi, Hachiouji, JP;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/021 ; G03F 7/039 ; G03F 7/30 ;
U.S. Cl.
CPC ...
G03F 7/021 ; G03F 7/039 ; G03F 7/30 ;
Abstract
A chemically amplified photosensitive resin composition containing a first compound forming an acid by irradiation of actinic ray and a second compound that changes the solubility to an aqueous alkali solution with acid-catalyzed reaction wherein an ion dissociative compound having the composition represented by the general formula (1) or (2), as well a method of forming a resist pattern using the composition are disclosed, the formulae being expressed by: