The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2001
Filed:
Feb. 01, 1999
Philip J. Hipol, Oro Valley, AZ (US);
David R. Hill, Tucson, AZ (US);
Etec Systems, Inc., Hayward, CA (US);
Abstract
A preload hydrostatic bearing includes a pad, a diaphragm and an adjustable member. The pad has a bearing structure, an inlet manifold, and a plurality of orifices. The orifices direct a fluid, such as air, from the inlet manifold toward the bearing surface. The diaphragm is mounted on the pad, and the adjustable member, which extends in an axial direction, is coupled proximate one end to a center portion of the diaphragm. The diaphragm transfers a preload in the axial direction to the adjustable member. This preload hydrostatic bearing has a high repeatability of performance, because a single diaphragm replaces prior art mechanical coupling devices, such as ball bearings, conical seats and spring washers, which undesirably are sources of friction and hysteresis.