The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2001
Filed:
Dec. 14, 1999
Kunitoshi Nishimura, Tsukuba, JP;
Mitutoyo Corporation, Kanagawa, JP;
Abstract
A micro-geometry measuring device capable of reducing measuring force thereof for avoiding damage on micro-geometry of workpiece surface and measuring at a high-speed is provided. The micro-geometry measuring device has a stylus mechanism having a stylus mechanism provided to an arm and having a stylus body, a measuring force adjusting mechanism for adjusting a measuring force working between the stylus body and the workpiece, a displacement sensor for detecting a position of the arm, and a measuring force controller for controlling the measuring force adjusting mechanism. The stylus mechanism includes a vibrator for resonantly vibrating the stylus body, and a detector for detecting vibration status changing when the stylus body touches the workpiece. The change in vibration of the stylus body vibrated by the vibrator is directly detected by the detector and a signal therefrom is fed back to the measuring force controller to keep constant measuring force working between the stylus body and the workpiece.