The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2001
Filed:
Apr. 01, 1999
Sharad Saxena, Richardson, TX (US);
Karthik Vasanth, Richardson, TX (US);
Richard G. Burch, McKinney, TX (US);
Purnendu K. Mozumder, Plano, TX (US);
Suraj Rao, Dallas, TX (US);
Joseph C. Davis, Allen, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A statistical design method is provided for minimizing the impact of manufacturing variations on semiconductor manufacturing by statistical design which seeks to reduce the impact of variability on device behavior. The method is based upon a Markov representation of a process flow which captures the sequential and stochastic nature of semiconductor manufacturing and enables the separation of device and process models, statistical modeling of process modules from observable wafer states and approximations for statistical optimization over large design spaces. The statistical estimation component of this method results in extremely accurate predictions of the variability of transistor performance for all of the fabricated flows. Statistical optimization results in devices that achieve all transistor performance and reliability goals and reduces the variability of key transistor performances.