The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2001
Filed:
Mar. 29, 1999
Applicant:
Inventors:
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/3544 ; H01L 2/176 ;
U.S. Cl.
CPC ...
H01L 2/3544 ; H01L 2/176 ;
Abstract
The semiconductor device with the alignment mark includes a convex portion as a film growth control region for forming side surfaces approximately parallel to sidewalls on surfaces opposite to the sidewalls of first metal interconnection layer formed in a recess portion of the alignment mark at the time of deposition of first metal interconnection layer. Thus, the semiconductor device with the alignment mark and manufacturing method thereof allowing the easy and accurate detection of the location of a layer deposited on side surfaces of the alignment mark can be provided.