The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2001
Filed:
Mar. 01, 1999
Applicant:
Inventors:
Tony D. Flaim, St. James, MO (US);
Douglas J. Guerrero, Rolla, MO (US);
Michelle R. Fowler, Salem, MO (US);
William J. James, Rolla, MO (US);
Vladimir Petrovsky, Rolla, MO (US);
Harlan U. Anderson, Rolla, MO (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/028 ; G03F 7/038 ; G03F 7/09 ; C08G 6/700 ; C08G 7/900 ;
U.S. Cl.
CPC ...
G03F 7/028 ; G03F 7/038 ; G03F 7/09 ; C08G 6/700 ; C08G 7/900 ;
Abstract
A composition is derived from an addition polymerizable organotitanium polymer which upon exposure to an oxygen plasma or baking in air, is converted to titanium dioxide (titania) or is converted to a mixed, titanium-containing metal oxide. The metal oxide formed in situ imparts etch-resistant action to a patterned photoresist layer. The composition may also be directly deposited and patterned into permanent metal oxide device features by a photolithographic process.