The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2001
Filed:
Jan. 17, 2001
Tomowaki Takahashi, Yokohama, JP;
Yutaka Suenaga, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A catoptric reduction projection optical system (,) is provided with a first catoptric optical system (,) that images an object (R) in first (object) plane (OP) into a second plane (,) and forming an intermediate image (II) therein, and a second catoptric optical system (,) that images the intermediate image in the second plane onto a third (image) plane (IP), thereby forming a reduced image of the object in the first (object) plane onto the third (image) plane. The first catoptric optical system comprises a first mirror pair comprising two reflective mirrors (M,, M,). The second catoptric optical system comprises a second mirror pair comprising a convex mirror (M,) and a concave mirror (M,). The system also preferably satisfied a number of design conditions.