The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 09, 2001

Filed:

Nov. 24, 1998
Applicant:
Inventors:

Kiyokazu Okamoto, Tsukuba, JP;

Yoshiyuki Omori, Kure, JP;

Assignee:

Mitutoyo Corporation, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 1/124 ;
U.S. Cl.
CPC ...
G01B 1/124 ;
Abstract

A phase delay correction system for use in a shape measurement is capable of removing the distortion of a restored shape and the mechanical positional deviation caused by a phase delay occurring during signal processing, and enables a Fourier series processing procedure to be adopted as is. A detector performs a relative scan of an object to be measured at a constant speed. A signal processing unit converts a shape detection signal obtained by the scan to digital data, and processes the digital data. The signal processing unit has a digital filter for removing a noise component, an LUT memory for storing correlation data representing a correlation between a spatial phase and an amount of phase delay measured in advance in an output of the filter a Fourier coefficient calculating section for calculating coefficients of a cosine component and a sine component of each spatial phase for expressing detection data obtained from the filter in a Fourier series, and a Fourier coefficient correction section for correcting each of the coefficients calculated by the calculating section, on the basis of the data read out from the LUT memory.


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