The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2001
Filed:
Feb. 16, 1999
Applicant:
Inventors:
Assignee:
Samsung Electronics Co., Ltd., Kyungki-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/708 ; H01J 3/730 ;
U.S. Cl.
CPC ...
H01J 3/708 ; H01J 3/730 ;
Abstract
An ion implantation apparatus for use in manufacturing semiconductors includes a loopback device connected to a bias ring for a Faraday cup. The loopback device detects whether a current flows through the bias ring and generates an interlock signal to be supplied through an interface to a controller. In response to the interlock signal, the controller stops an implantation operation of the apparatus, and a driver circuit drives a warning device in response to the interlock signal.