The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2001
Filed:
Feb. 07, 2000
Applicant:
Inventors:
Assignee:
Chartered Semiconductor Manufacturing Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1425 ;
U.S. Cl.
CPC ...
H01L 2/1425 ;
Abstract
A process for fabricating a MOSFET device, featuring a narrow lateral delta doping, or a narrow anti-punchthrough region, located in the center of the MOSFET channel region, has been developed. The process features formation of the narrow, anti-punchthrough region, via use of an ion implantation procedure, performed using an opening, comprised with sidewall spacers, as an implant mask. After formation of the narrow, anti-punchthrough region, the sidewall spacers are removed, and a gate insulator layer, and a polysilicon gate structure, are formed in the spacerless opening, defining a channel region wider than the narrow, anti-punchthrough region.