The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2001
Filed:
Apr. 30, 1999
Applicant:
Inventor:
Yim Bun Patrick Kwan, Eindhoven, NL;
Assignee:
ASM Lithography, B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C 5/00 ; G03F 7/20 ; F16C 3/314 ; F16C 3/324 ; H01L 2/1027 ;
U.S. Cl.
CPC ...
G03C 5/00 ; G03F 7/20 ; F16C 3/314 ; F16C 3/324 ; H01L 2/1027 ;
Abstract
A gas (air) beating in a ceramic body is made using a separate restriction member to define the air restriction feature. The separate member may be a metal bushing in which an insert is fitted, the insert having an opening defining the actual restriction feature. Alternatively the separate member may be a ceramic plate with restriction features machined by laser or abrasion before or after attachment to the main body.