The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2001
Filed:
May. 06, 1999
Applicant:
Inventors:
Yen-Lin Ding, Hsinchu, TW;
Gary Hong, Hsinchu, TW;
Assignee:
United Microelectronics Corp., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/9788 ;
U.S. Cl.
CPC ...
H01L 2/9788 ;
Abstract
A flash memory cell. A spacer is formed on a sidewall of a controlling gate. A self-aligned source/drain region can thus be formed by the formation of the spacer. The tunneling oxide layer is then formed on the source/drain region instead of on the controlling gate. Thus, the tunneling oxide layer is formed with a self-aligned process.