Fluorescent x-ray analyzer useable as wavelength dispersive type and energy dispersive type

Abstract

A fluorescent X-ray analyzing apparatus capable of being used as either a wavelength dispersive type or an energy dispersive type is provided, with which the analysis can be performed quickly and accurately. The fluorescent X-ray analyzing apparatus includes a detecting unit for detecting and analyzing fluorescent X-ray (,) emitted from at least one target area (,) of a sample (,) to be analyzed as a result of excitation of such target area (,) with a primary X-ray (,). The detecting unit includes a wavelength dispersive type detecting unit (,) including a spectroscope (,) and a first detector (,), and an energy dispersive type detecting unit (,) including a second detector (,) of an energy dispersive type. The angle &thgr;1 formed between a first path (,) of travel of the fluorescent X-ray from the target area (,) towards the spectroscope (,) and a surface of the sample (,) is equal to the angle &thgr;2 formed between a second path (,) of travel of the fluorescent X-ray from the target area (,) towards the second detector (,) of the energy dispersive type and a surface of the sample (,), but the second path (,) is shorter than the first path (,).