The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2001
Filed:
Sep. 09, 1999
Applicant:
Inventor:
John G. Hartley, Fishkill, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/7304 ;
U.S. Cl.
CPC ...
H01J 3/7304 ;
Abstract
A method of calibrating an electron beam system in which a plurality of standard grids are mounted in various presentations in the electron beam system and treated as different presentations of the same grid for the purposes of applying algorithms to adjust a computer-controlled system for deflecting the electron beam. A standard grid mask is fabricated in an electron beam system and used in a stepper to make the standard grids, the same stepper and the same stepper optics being used to make each of the standard grids.