The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2001
Filed:
Jan. 25, 1999
Applicant:
Inventors:
Chih-Hsun Chu, Hsinchu, TW;
Chin-Hung Tseng, Hsinchu, TW;
Assignee:
United Microelectronics Corp., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1302 ; H01L 2/1461 ;
U.S. Cl.
CPC ...
H01L 2/1302 ; H01L 2/1461 ;
Abstract
A method for recovering the alignment mark on a substrate to the top of a dielectric layer. The method includes the steps of forming a dielectric layer over a substrate, and then forming a cap layer over the dielectric layer. The cap layer fills the trench in the dielectric layer directly above the alignment mark and covers the area surrounding the trench. Thereafter, a global planarization is carried out to remove the top portion of the cap layer. Finally, the remaining portion of the cap layer is removed to expose the dielectric layer so that an alignment mark re-emerges on top of the dielectric layer.