The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2001
Filed:
May. 26, 1999
Applicant:
Inventors:
Changming Jin, Austin, TX (US);
Joseph D. Luttmer, Richardson, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1469 ;
U.S. Cl.
CPC ...
H01L 2/1469 ;
Abstract
A phase separation during solvent evaporation of a solution containing polymer precursors leaves low pressure solvent without polymer precursor in minimal gaps. After polymerization, drive off the low pressure solvent to yield air gaps in the minimal gaps under the polymer.
Jin, Changming. (2001). Method of forming integrated circuit dielectric by evaporating solvent to yield phase separation (U.S. Patent No. 6284675). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6284675
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile