The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2001
Filed:
May. 30, 2000
Yong Ju, Singapore, SG;
Kai Shao, Singapore, SG;
Yimin Wang, Singapore, SG;
Shao-Fu Sanford Chu, Singapore, SG;
Chartered Semiconductor Manufacturing Ltd., Singapore, SG;
Abstract
A process for simultaneously forming a polysilicon gate structure, for a transfer gate transistor, and a polysilicon top plate, for a capacitor structure, on an underlying planar surface, has been developed. The process features the formation of a polysilicon bottom plate, for the capacitor structure, embedded in a first opening in composite insulator layer, and the formation of an active device region, for a transfer gate transistor structure, via the selective growth of an epitaxial silicon layer, in a second opening of the composite insulator layer, resulting in a planar top surface topography. The presence of this topography reduces the risk of residual polysilicon, present after patterning of the polysilicon gate structure, and of the capacitor, polysilicon top plate.