The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2001
Filed:
Apr. 14, 1999
Edward L. Sill, Phoenix, AZ (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A passive first-order band reject, or notch, filter characteristic is introduced into a supply and/or return line (,) of a heat transfer system (,) that uses electrically conductive liquid heat transfer medium in contact with radio frequency electrified components (,) typical in sputtering or etching manufacturing equipment. The heat transfer medium line (,) is coiled to create an inherent inductance (L,). A capacitive element (C,) is operatively connected across the coil (,) in the heat transfer medium line (,), the amount of capacitance chosen so that the resonant frequency is at the RF frequency of the components (,) being thermally conditioned. Thus, a high impedance is created for that frequency. The coil (,) and capacitor (C,) combination is protected from physical and electromagnetic interference by an enclosure (,).