The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2001
Filed:
Aug. 21, 2000
United Microelectronics Corp., Hsin-Chu, TW;
Abstract
An inside tube whose wall has oxide layer of impurities is provided, wherein the oxide layer is about 400K Å. The inside tube is washed with pure water by level-style washing. Then, taking the inside tube out and soaking it with hydrofluoric acid (HF). Next, the inside tube is taken out from hydrofluoric acid (HF) and it is soaked with pure water. It is dried with ammonia gas(NH,)after the inside tube is taken out from pure water. The inside tube is then washed with pure water by vertical-style washing, and it is dried with nitrogen gas (N,). Finally, the purged inside tube is set into furnace, then proceed a baking process about two hours at low temperature and low pressure to eliminate entirely remained acid from the inside tube, wherein the foregoing temperature range is about between 120° C. to 400° C. and the foregoing pressure is about 0.3 torr. The baking process begins proceeding to follow the purged process has been finished.