Method of fabricating structure for chip micro-joining

Abstract

A structure and process for joining semiconductor components. The present invention allows the flexibility of fabricating electronic components, or semiconductor chip structures, to a common point and electrically joining the different parts together at a back end level, or to a metal wiring level, to complete circuit functionality. Different combinations of front end of the line device chips may be readily joined to a common back end of the line device using a small electrical connection to form a small semiconductor chip package. Instead of packaging different groups of semiconductor chips onto different substrates and then electrically connecting each substrate together for circuit and component functionality, each group of chips can be formed on a single substrate and electrically joined on a back end wafer. These electrically connected and combined groups of chips becomes, for all practical purposes, one chip. The micro-joining of these electronic devices enhances “chip” electrical performance due to reductions in resistance and shorter wiring lengths between devices.