The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2001
Filed:
Nov. 23, 1998
Applicant:
Inventor:
Shinichi Kitamura, Saitama, JP;
Assignee:
Jeol Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J 4/840 ;
U.S. Cl.
CPC ...
H01J 4/840 ;
Abstract
There is disclosed a scanning probe microscope for producing a topographic image of a surface of a sample by noncontact AFM (atomic force microscopy). First, a first topographic image of the sample undergoing magnetic effects is produced from the resonance frequency of a cantilever by FM detection. Then, a second topographic image of the sample free of magnetic effects is produced from the amplitude of the cantilever by slope detection. The difference between these two topographic images is taken. Thus, a magnetic force image is produced.