The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2001
Filed:
Jun. 29, 1999
Applicant:
Inventors:
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/144 ; H01L 2/14763 ; H01L 2/1302 ; H01L 2/1461 ;
U.S. Cl.
CPC ...
H01L 2/144 ; H01L 2/14763 ; H01L 2/1302 ; H01L 2/1461 ;
Abstract
A method of protecting a tungsten plug from corroding. After a tungsten plug is formed in a substrate, a wire is formed on the substrate to couple with the tungsten plug. The substrate is dipped into an electrolyte solution. The electrolyte solution is acid or alkaline enough to discharge charges accumulated on the wire. Then, a wet cleaning process is performed to remove polymer formed on the wire.