The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2001
Filed:
Oct. 04, 1998
Chen-Chung Hsu, Taichung, TW;
United Microelectronics Corp., Hsinchu, TW;
Abstract
A method of manufacturing borderless contact can compensate for misalignment that occurs during formation of the contacts. First, a substrate with a gate structure on it is provided. The substrate also has source/drain regions. Spacers are formed on the sidewalls of the gate structure. Thereafter, an insulating layer conformal to the substrate profile is formed over the substrate. Then, a portion of the insulating layer is removed so that the remaining isolating layer at least covers the gate structure and the source/drain regions. Next, a dielectric layer having openings is formed over the insulating layer, and then a portion of the insulating layer at the bottom of the openings is removed to expose the source/drain region, thereby forming contact openings. Finally, conductive material is deposited into the contact openings to form contacts that couple electrically with the respective source/drain regions.