The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2001
Filed:
Nov. 17, 1998
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A substrate transporting device and method,transports a plurality of wafers W standing upright in a row, from a previous process, i.e., a cleaning process. A substrate holder,is carried by a transporting device,arranged outside a drying chamber,. The substrate holder,receives the wafers W from the substrate transporting device,while maintaining a posture of the wafers W. The transporting device,lowers the substrate holder,and sequentially moves it into the drying chamber,through an unloading and loading port,above the drying chamber,. Thereafter, the substrate holder,is fixed to a rotor,. After closing the unloading and loading port,with a lid body,, the rotor,is rotated. In this way, moisture sticking to surfaces of the wafers W is eliminated.