The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2001
Filed:
Aug. 30, 1999
Applicant:
Inventors:
Orest Bula, Shelburne, VT (US);
Daniel C. Cole, Jericho, VT (US);
Edward W. Conrad, Jeffersonville, VT (US);
David Vaclay Horak, Essex Junction, VT (US);
Jed Hickory Rankin, Burlington, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/772 ; G02B 2/602 ; C23C 1/400 ;
U.S. Cl.
CPC ...
G03B 2/772 ; G02B 2/602 ; C23C 1/400 ;
Abstract
The distribution of ultraviolet light irradiated from an illumination source to optical elements of a projection exposure device is varied by an illumination aperture. The illumination aperture is formed with a plurality of openings which may be opened or closed independently to the passage of irradiating light. The size and shape of the opening formed by the plurality of openings of the illumination aperture is determined according to the particular image to be projected.