The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2001
Filed:
Sep. 28, 1999
Haruo Iwatsu, Kumamoto-ken, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
When a glass substrate is conveyed from a processing device group side to an accommodating apparatus, the glass substrate is accommodated to a first accommodating portion corresponding to the layer formed on the glass substrate. When a predetermined number of glass substrates have been accommodated to each accommodating portion, glass substrats accommodated in each accommodating portion corresponding to the layer of the glass substrates are conveyed to an exposing device side. After the exposing device has performed an exposing process for glass substrates, they are successively accommodated to the relevant accommodating portion. In the order of which glass substrates have been conveyed from the processing device group side to the accommodating apparatus, the glass substrates are returned to the processing device side.