The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2001
Filed:
Dec. 29, 1999
Itaru Iida, Higashiyatsushiro-gun, JP;
Tokyo Electron Limited, , JP;
Abstract
A test system of the present invention is suitable especially for a reliability test. A reader (,) for reading a wafer identification code attached to a wafer (W) and a reader (,) for reading a shell identification code (,) attached to a test shell (,), are provided for an aligner (,). A reader (,) for reading the shell identification code (,) is provided for a rest apparatus. A transmission system (,) is provided, through which information read by the readers (,) are exchanged between the aligner (,) and the test apparatus (,). A storage devices (,) are used for storing the information. Owing to the use of these structural elements, the IC chips formed on a semiconductor wafer can be accurately tested with high efficiency. The test shell used in the test can be disassembled accurately and reliably.