The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2001
Filed:
Jul. 23, 1999
Applicant:
Inventors:
Steven C. Avanzino, Cupertino, CA (US);
Stephen Keetai Park, Cupertino, CA (US);
Bharath Rangarajan, Santa Clara, CA (US);
Jeffrey A. Shields, Sunnyvale, CA (US);
Larry Yu Wang, San Jose, CA (US);
Guarionex Morales, Sunnyvale, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1336 ; H01L 2/13205 ; H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/1336 ; H01L 2/13205 ; H01L 2/14763 ;
Abstract
A method of forming spacers in an integrated circuit is disclosed herein. The method includes providing a gate structure over a semiconductor substrate, depositing a spacer material adjacent lateral sides of the gate structure, and etching the spacer material to form spacers. The spacers have minimal surface area exposed to direct sputter.