The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2001
Filed:
Oct. 08, 1999
Applicant:
Inventors:
Assignee:
Tosoh Corporation, Yamaguchi-ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 3/514 ; C04B 3/516 ;
U.S. Cl.
CPC ...
C04B 3/514 ; C04B 3/516 ;
Abstract
A mixture of zinc sulfide and silicon dioxide as starting material powder mixed with zinc oxide in an amount of from 0.5 to 5 wt % is subjected to hot pressing sintering to obtain a sintered body. In this manner, a high density sputtering target using the sintered body can be obtained at a high yield.