The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2001
Filed:
Dec. 18, 1998
Applicant:
Inventors:
George R. Misium, Plano, TX (US);
Sunil V. Hattangady, McKinney, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1469 ;
U.S. Cl.
CPC ...
H01L 2/1469 ;
Abstract
A method is disclosed of nitridating an oxide containing surface the disclosed method includes the steps of, obtaining a substrate, growing an oxide layer on the substrate, exposing the surface of the oxide layer to a nitrogen ion containing plasma at, e.g., room temperature, wherein the nitrogen ions form a nitrided layer on the oxide layer resistant to chemistries used to etch oxide.