The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2001
Filed:
May. 23, 1994
Robert H. Eklund, Plano, TX (US);
Robert H. Havemann, Garland, TX (US);
Leo Stroth, Wolfersdorf, DE;
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A method of forming an integrated circuit device including at least one polysilicon resistor,is disclosed herein. A polysilicon layer,is formed, possibly over a field oxide,. The polysilicon layer,is then doped to achieve a selected sheet resistance. An insulating layer,(e.g., an oxide, a nitride, or a combination thereof) is then formed over the polysilicon layer,. The insulating layer,is patterned and etched to define a resistor body,in the underlying polysilicon layer,. The polysilicon layer,is then patterned and etched to define first and second resistor heads,abutting the resistor body,while simultaneously at least one polysilicon element,of a second electronic device is formed. Other systems and methods are also disclosed.