The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2001
Filed:
May. 08, 1998
Li-Ren Lin, Chu Pei, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Abstract
The present invention discloses a method for controlling lots' dispatch of tool groups, and all the lots can be transferred to correct places for further processing. The lots are transferred to the storage places of the tool when there is only a single tool for the next process. A decision step is performed for deciding whether the storage places of the next tool group and the next-next tool group overlap when the next process contains a tool group. If there are overlapped storage places, then the lots will be moved to the overlapped storage place having minimum loading. When there is no overlapped storage place, the lots will be dispatched to the storage place having minimum loading among the next tool group. All the lots can be processed with at minimum moving steps, and all the tools perform their processes under balance loading whenever the productions increase or decrease.