The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2001
Filed:
Aug. 31, 1999
Richard W. Jarvis, Austin, TX (US);
Advanced Micro Devices, Sunnyvale, CA (US);
Abstract
According to an example embodiment of the present invention, a semiconductor device having conductive structure is analyzed using acoustic energy. Acoustic energy is generated in the device, and a resulting acoustic wave is detected. Using the detected wave, an index of refraction of a portion of the conductive structure is determined as a function of the wave. The calculated index of refraction is used and at least one defect in the conductive structure is detected. Using this method, defects can be detected during or after the manufacture of semiconductor devices in a cost effective, reliable manner. This method is particularly useful for defects that are not detectable using typical optical scanning methods due to opaque material in semiconductor devices.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile