The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2001
Filed:
Feb. 05, 1998
Hiroshi Amemiya, Yamanashi-ken, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In the embodiment of this invention, a probe apparatus includes a loader chamber having fork for conveying the wafer, a prober chamber arranged next to the loader chamber and having a main chuck movable in the X, Y, Z, and &thgr; directions, a partition for separating the prober chamber from the loader chamber, and a door for opening/closing the loading/unloading port of the wafer, which is formed in the partition. This probe apparatus inspects the electrical characteristics of the wafer while supplying dry air at a temperature at which moisture condensation does not occur into the prober chamber to cool the wafer through the main chuck. A heated gas spray unit sprays a heated gas onto the wafer which is moving from the prober chamber to the loader chamber through a loading/unloading port, thereby heating the wafer to a temperature higher than room temperature.