The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2001
Filed:
Jun. 08, 1999
Shin-Etsu Handotai Co., Ltd., Tokyo, JP;
Abstract
There is disclosed an integrated type multiple-layered ceramic heater based on resistance heating comprising an electrical insulating ceramic support substrate, a heater pattern composed of electroconductive ceramic or metal, which is adhered to a surface of the substrate, and an electrical insulating ceramic protective layer covering the heater pattern, wherein a feeding terminal of the heater is connected to a power source terminal member through a feeding member which generates heat when supplied with electric current. The feeding member preferably generates heat at a power density substantially equal to that of the heater. The multiple-layered ceramic heater of the present invention exhibits excellent thermal uniformity, and does not adversely affect thermal uniformity of an object to be heated even when the feeding terminal is present at a location facing the object to be heated.