The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2001
Filed:
May. 06, 1999
Houng-Chi Wei, I-Lan, TW;
Wei-Shang King, Taipei, TW;
Mosel Vitelic Inc., Hsinchu, TW;
Abstract
A method of forming a DRAM cell with a trench capacitor over a semiconductor substrate comprises the following steps. First, an etching step is performed to form a trench structure in the substrate, wherein the trench structure has a bottom and sidewalls, and the sidewalls are adjacent to the bottom. Then, the trench structure is doped to form a doping region on the bottom and a portion of the sidewalls. A selective etching step is performed to remove a portion of the doping region, wherein a selectivity of the doping region is higher than that of undoped sidewalls. A dielectric layer is formed on a top surface of the trench structure. A conducting layer is then formed in the trench structure. Next, a gate structure is formed on the substrate. A doping step is used to form the drain/source structures adjacent to the gate. A strap region is formed to couple the conducting layer and the drain/source structures.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile