The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2001
Filed:
Dec. 06, 1996
Applicant:
Inventor:
John Oshinowo, Schwenningen, DE;
Assignee:
STEAG Microtech GmbH, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/12 ;
U.S. Cl.
CPC ...
B08B 3/12 ;
Abstract
A treatment apparatus for treating substrates includes a fluid container and a device for moving in a reciprocating manner the substrates within the fluid container during treatment to thereby make accessible areas of the substrates that would otherwise be obstructed by parts of the device.