The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2001
Filed:
Sep. 28, 1998
Applicant:
Inventor:
Kazuo Moriya, Ageo, JP;
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
G01N 2/186 ;
U.S. Cl.
CPC ...
G01N 2/186 ;
Abstract
A defect evaluation apparatus of this invention includes a laser irradiation unit for obliquely irradiating a laser beam onto an object, and an observation unit for observing scattered light from inside the object or a surface of the object. The laser irradiation unit irradiates the laser beam onto the object from a plurality of incident directions around an observation optical axis, and the observation unit receives the scattered light from the object to obtain shape information of a defect in the object or on the surface of the object.