The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2001
Filed:
Jan. 22, 1999
Keiichi Tanaka, Nirasaki, JP;
Masaki Sohma, Nirasaki, JP;
Shinsuke Asao, Yamanashi-Ken, JP;
Masahito Ozawa, Yamanashi-Ken, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
An auxiliary vacuum chamber,according to the invention comprises a container,having an opening,for taking an object to be processed W into and out of the container. A holder,is movably placed in the container,, which can hold the object W taken therein. The holder,can also form a hermetically closed space,with a portion of the container,when moved in the container,. The container,is provided with supplying means,for supplying a gas from the outside of the container,into the hermetically closed space,. The container,is also provided with exhaust means,for exhausting the gas from the hermetically closed space,to the outside of the container,. According to the invention, the auxiliary vacuum chamber,need not have gate-valves for being opened and shut to the other chambers,and