The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2001
Filed:
Apr. 24, 1998
Applicant:
Inventors:
Tsuyoshi Nakamura, Tama, JP;
Satoshi Tochiori, Kawagoe, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B 1/918 ;
U.S. Cl.
CPC ...
G05B 1/918 ;
Abstract
A process control system includes a plurality of machine controllers for individually controlling a plurality of process chambers and a main controller for controlling the machine controllers. Each of the machine controllers has a function of transferring process data detected by its corresponding process chamber to the main controller. The main controller has a storage device for accumulating process data transferred from the machine controllers and a function of transferring the accumulated process data to a host computer when the main controller is in a predetermined control load state.