The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2001
Filed:
Dec. 21, 1998
Ernest E. Allen, Jr., Rockport, MA (US);
Robert J. Mitchell, Saugus, MA (US);
Perry J. I. Justesen, Beverly, MA (US);
Alexander F. Pless, Rockport, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
An improved bellows assembly (,) is provided for use in, for example, an ion implanter (,). The bellows assembly comprises a first mounting portion (,) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (,); a second mounting portion (,) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (,); and a steel bellows (,) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (,) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises a first sliding plate (,) having a first wear plate (,), a second sliding plate (,) having a second wear plate (,), and an elastomeric seal (,) for maintaining a vacuum condition at the slidable mating surface provided between the first and second wear plates.