The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2001
Filed:
Sep. 14, 1999
Applicant:
Inventor:
Masayuki Kuwabara, Machida, JP;
Assignee:
Tokyo Seimitsu Co., Ltd., Mitaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/126 ;
U.S. Cl.
CPC ...
G01R 3/126 ;
Abstract
An apparatus correctly detects critical defects in spaces between wiring patterns on semiconductor integrated devices. The apparatus picks up gray level images from semiconductor dies, sequentially reads the images strip by strip, each strip consisting of pixels aligned in a row or column direction, calculates an optimum grouping operator for the strip, divides the pixels into groups according to the grouping operators, sets thresholds for the groups, compares the thresholds with gray level differences between the gray level images, and detects defects on the semiconductor dies. Also provided is a method to achieve this technique.